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LAM 810-046015-010 Semiconductor equipment control module
| Brand:LAM |
| Item NO:810-046015-010 |
| Condition: In stock, brand new/Used |
| Warranty: 365 days |
| Payment:T/T 30% deposit, 70% balance |
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Products that have been released are welcome for consultation. Due to the wide variety of models, we were unable to upload physical images one by one!
810-046015-010 is a high-performance control module launched by Lam Research, dedicated to key functions such as motion, communication, and temperature control inside semiconductor manufacturing equipment (such as plasma etching, thin film deposition, etc.). 810-046015-010 features a compact design with multiple industrial interfaces and protection levels, providing reliable and precise control in harsh production environments.
Model: 810-046015-010
Brand: LAM (Lam Research)
Type: Control Module (Motion/Communication/Temperature Control)
Applicable equipment: Semiconductor manufacturing equipment (etching chamber, deposition equipment, etc.)
Interface: EtherCAT (810-046015-010)
Communication protocol: RS-485 (temperature controller)
Power supply: 24V DC (control module)
Power consumption:<20W
Operating temperature range: 0 ° C to 50 ° C (control module)
0 ° C to 200 ° C (temperature controller)
Temperature accuracy: ± 0.1 ° C (temperature controller)
Temperature stability: ± 0.05 ° C (temperature controller)
Control method: PID (temperature controller).

Function Introduction:
High precision motion and temperature control: 810-046015-010 supports PID control, with a temperature error of less than ± 0.1 ° C, suitable for etching and deposition processes with extremely high requirements for process windows.
Multi protocol compatibility: EtherCAT and RS-485 dual interfaces facilitate seamless integration with upper level systems (MES, SCADA).
Reliable industrial protection: IP30/IP20 protection level, able to resist dust and mild liquid intrusion.
Compact and lightweight: only 250g, size approximately 100xx60x30mm, easy to install in environments with limited internal space of the device.
Wide temperature operating range: from 0 ° C to 200 ° C (temperature control) and from 0 ° C to 50 ° C (control module body), meeting the environmental requirements of most semiconductor processes.
Category: Industrial Control Module
Sold to: Global
Scope of application: Steel plants/thermal power plants/tire plants/water plants, etc
Service advantages: foreign imports, stock supply, competitive prices, and quality assurance
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