For several years, CHANGXIN have specialized in trading high-quality components in the field of industrial automation.
Focusing on PLC components, DCS and CNC technology, and drivetechnology
ZYGO ZMI4104 6U VME64x Laser Interference Displacement Measurement Module
| Brand: ZYGO |
| Item NO: ZMI 4104 |
| Effect: Receive interferometer optical signals and calculate axial displacement of motion |
| Condition: In stock, brand new/Used |
| Warranty: 365 days |
| Payment:T/T 50% deposit, 50% balance |
| www.szcxdcs.com |
+86 15359298293
ZYGO ZMI4104 6U VME64x Laser Interference Displacement Measurement Module
ZMI 4104 is ZYGO ZMI Series 6U VME64x high-precision laser interferometric displacement measurement board. It is the signal receiving and processing unit of the heterodyne interferometry measurement system, used in conjunction with the ZYGO ZMI series laser light source and interferometric optical head, to collect interferometric light signals and calculate displacement and position data in real time. ZMI 4104 is a four axis channel design designed for nanoscale precision metrology scenarios. It is commonly used in high demand equipment such as semiconductor lithography platforms, precision machine tools, optical inspection, and aviation precision alignment, providing closed-loop position feedback and motion calibration data.
————————Shenzhen Changxin Automation Equipment Co Ltd -————————
Products that have been released are welcome for consultation. Due to the wide variety of models, we were unable to upload physical images one by one!
Product function
- Nano level displacement/position measurement: Receive interferometer optical signals, calculate axial displacement and position deviation of motion, and provide high-precision position feedback to the motion control system;
- Multi axis synchronous acquisition: Single card supports four axis parallel measurement, multi card modular stacking, and the entire system can be expanded to up to 64 measurement axes, suitable for multi degree of freedom precision platforms;
- Nonlinear error suppression: equipped with patented cyclic error compensation function, automatically eliminates the inherent periodic errors of the interference system, and improves long-term measurement stability;
- High speed dynamic measurement: supports real-time tracking of high-speed moving targets, meeting the dynamic positioning control of crystal cones, gratings, and precision scanning mechanisms;
- System integration interface: It is connected to the upper controller and motion control unit through the VME bus, and can cooperate with the environmental compensation module to correct the air refractive index error caused by temperature, humidity, and air pressure, ensuring the accuracy of the production site.
ZYGO ZMI4104 6U VME64x Laser Interference Displacement Measurement Module
Parameter Specifications
| Item | Specification |
|---|---|
| Form Factor | 6U VME64x |
| Axes per board | 4 |
| Position resolution | 0.15 nm |
| Maximum velocity | ±2.55 m/s |
| Accuracy at max velocity (σ) | 0.2 nm |
| Minimum optical power | 0.07 µW |
| Compatible lasers | 7702, 7714, 7724 |
| Cyclic error compensation | Available |
Product features
- Four channel independent measurement, single card 4-axis synchronous acquisition, modular VME chassis expansion, maximum 64 axis system scale;
- Sub nanometer level position resolution, heterodyne orthogonal signal processing, supporting stable high-precision output under high-speed motion;
- Optional patent cycle error compensation to reduce periodic nonlinear measurement errors in DMI interferometric systems;
- Standard 6U VME64x board specification, can be directly installed into industrial VME chassis, easy to integrate into existing precision control systems;
- Compatible with ZYGO 7702, 7714, 7724 series lasers;
- Support environmental refractive index compensation, can be connected to temperature, air pressure, and humidity sensors to reduce the impact of on-site environmental drift;
- Industrial grade stable design, suitable for continuous online measurement, equipment closed-loop positioning, and factory precision calibration.
GE Mark VIe Series IS220PCNOH1B CANopen Communication I/O Module
T8461C | ICS TRIPLEX Trusted TMR Digital Output Module
GDB021BE01 HIEE300766R0001 Multi-channel Current Acquisition Module
ABB 3BHB030310R0001 5SHY4045L0006 3BHE039203R0101 GVC736CE10 IGCT series power module
PM866A 3BSE076359R1 ABB 800xA System Core Processor Unit (CPU)
PM511V16 3BSE011181R1 ABB Digital signal processing control board
PM891 | 3BSE053240R1 | ABB Central Processing Unit (CPU) Module
3BHE014070R0101 | PPC905AE101 | ABB PLC logic controller board
ABB CI860K01 3BSE032444R1 CI860K01 Implement fieldbus interface function
