AMAT 0190-34055 CDN496RC Plasma Process Control Board

AMAT 0190-34055 CDN496RC Plasma Process Control Board

0190-34055 CDN496RC is a CPCI bus vacuum/plasma process control board used in conjunction with AMAT semiconductor equipment. 0190-34055 CDN496RC is compatible with AMAT etching and thin film deposition semiconductor machines. The board is responsible for collecting vacuum pressure, gas flow rate, plasma related analog and digital signals, executing process logic operations, outputting control instructions to drive solenoid valves, pressure controllers, and RF supporting accessories; Simultaneously completing signal isolation, status monitoring, and fault diagnosis, ensuring stable operation of vacuum and gas processes in semiconductor process chambers such as wafer etching and PVD/CVD deposition through CPCI bus and machine main control communication. 0190-34055 CDN496RC belongs to the core signal control board of semiconductor process chambers.

Parameter Specifications

AMAT 0190-34055 CDN496RC Plasma Process Control Board

————————Shenzhen Changxin Automation Equipment Co Ltd -————————

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Main product range

• Control system (DCS/PLC/CNC): panel controller, HMI and human-machine interface, industrial PC, CPU processor module, communication module, analog/digital I/O module
• Drive and motion control: frequency converter, servo drive, servo motor, power module
• Robot spare parts: key spare parts such as robot control board, axis computer, servo unit, I/O module, etc
• State monitoring and safety system: vibration monitoring system, safety instrumented system (SIS), redundant controller

Product features

1. 3U CPCI hot swappable board design, semiconductor equipment cabinet rack installation, supports live plugging and replacement, reduces machine downtime maintenance time.
2. Isolate multiple analog and digital channels, collect signals from chamber pressure and flow sensors, output valve and interlock control signals, and design signal isolation to resist electromagnetic interference from plasma and radio frequency environments.
3. The front panel integrates NET, MOD, and 24V status indicator lights, allowing for intuitive viewing of communication, module operation, and power status, facilitating quick troubleshooting on site.
4. Built in hardware self diagnosis, real-time monitoring of board power supply, channel disconnection, communication abnormalities, fault reporting to the machine control system and triggering process protection.
5. MKS original firmware, fully compatible with AMAT Centura and Endura series etching and PVD deposition chamber software, ensuring semiconductor process repeatability.
6. The PCB of the board is coated with three anti coatings to adapt to the working conditions of the control cabinet in the semiconductor clean room, and is resistant to dust and moisture.
7. Exclusive semiconductor process interlock logic, automatically triggering safety protection in case of gas or vacuum abnormalities to prevent wafer scrap and chamber damage.
8. Belonging to AMAT’s old cavity spare parts, the original machine has been discontinued, and semiconductor fab factories often use disassembled spare parts for maintenance and replacement.

Application Industry

The products are widely used in various industrial fields such as metallurgy, oil and gas, petrochemicals, electricity, power transmission and distribution, water conservancy, water treatment and environmental protection, coal mining, aluminum industry, glass manufacturing, paper and printing, textile printing and dyeing, machinery manufacturing, electronics manufacturing, automobile manufacturing, plastic machinery, boiler heating, energy, etc.