AMAT 0021-84842 is a device produced by Applied Materials, with the model number “Pumping Liner V5.1 Clan Producer Spare”. 0021-84842 product is a key component in semiconductor manufacturing equipment, mainly used in chemical mechanical polishing (CMP) processes to control and regulate gas flow and pressure, ensuring the uniformity and stability of wafers during processing.
Product Introduction：
Product Name: Pumping Liner V5.1 Clan Producer Spare
Model: 0021-84842
Function: The 0021-84842 component is a vacuum pumping coil used in CMP equipment to provide stable gas flow and pressure control during wafer processing. It ensures uniform polishing and cleaning of the wafer surface by regulating the inflow and outflow of gas.

Technical Parameter：
Material: Mainly made of copper (Cu), some components may contain other metallic materials.
Interface: 0021-84842 is compatible with SMC (Pneumatic Component) system and supports multiple connection methods.
Working environment: Suitable for high vacuum and high-precision semiconductor manufacturing environments, capable of stable operation under high temperature, high pressure and other conditions.
High precision: able to accurately control gas flow, ensuring the uniformity and consistency of the wafer surface.
Durability: Made of high-quality materials, it has a long service life and good corrosion resistance.
Compatibility: 0021-84842 is compatible with various semiconductor devices and systems, making it easy to integrate and maintain.

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contact information

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