Agilent 5517D dual frequency helium neon laser head

Agilent 5517D dual frequency helium neon laser head

5517D is the core light source unit of the Agilent 5517 series dual frequency helium neon laser head, which belongs to the heterodyne laser interferometry measurement system. By relying on Zeeman splitting to generate two polarized lasers with stable frequency differences, and combining them with interferometers and signal processing cards to form a high-precision displacement measurement system, the 5517D is widely used in high-precision motion control scenarios such as semiconductor lithography machines, flat panel display devices, precision machine tool calibration, and coordinate detection.

Product function

1. Provide a reference laser source: output a highly stable 633nm helium neon laser as an optical reference for measuring length, displacement, and velocity using a laser interferometer.
2. Generate dual frequency polarized beam: Internally implement Zeeman frequency shift to generate two orthogonal polarized lasers with fixed frequency difference, meeting the principle of heterodyne interferometry measurement.
3. Output reference frequency signal: The built-in photoelectric sampling unit outputs a standard reference TTL frequency signal, which is sent to the measurement circuit for calculating the target displacement and motion speed.
4. Precision motion closed-loop measurement: In conjunction with interferometric optical components, real-time measurement of platform linear displacement, angle, and velocity is achieved to achieve nanometer level positioning feedback for lithography machines and precision equipment.
5. Equipment accuracy calibration: used for regular geometric accuracy testing and error compensation of machine tools and automation platforms.
6. Building a multi axis measurement system: A single laser beam can be split and extended to a multi axis interference optical path, constructing a multi-dimensional synchronous measurement scheme.