MKS ASTEX FI20162-1 Microwave Plasma Power Supply

MKS ASTEX FI20162-1 Microwave Plasma Power Supply

FI20162-1 (ASTEX Microwave SmartPower) is an MKS ASTEX series microwave plasma power supply, which belongs to the semiconductor process specific microwave generation source. FI20162-1 microwave plasma power supply outputs stable microwave energy to excite process gases to form plasma, which is used for wafer processes such as etching, deposition, ashing, and de gluing; Built in power closed-loop regulation, standing wave protection, fault diagnosis unit, receives power commands set by the upper computer, provides real-time feedback on output power and reflected power status, and is the core energy supply unit of dry plasma technology.

Product features

1. A 2.45GHz fixed frequency microwave source with power closed-loop control, high plasma stability, and good process repeatability.
2. The built-in directional coupler monitors the reflected power in real time, automatically reduces power or shuts down if the reflection exceeds the standard, and protects the magnetron.
3. Enrich the safety interlock circuit, support cavity door interlock and vacuum interlock, and meet the safety regulations of semiconductor factories.
4. Dual control mode of analog and serial ports, compatible with old semiconductor device controllers.
5. 19 inch standard rack structure, suitable for integrated installation of wafer equipment machine cabinets.
6.  Air cooling solution, with built-in temperature protection, locks microwave output when overheated.
7. Fault code storage function, convenient for maintenance personnel to quickly locate faults related to magnetron, power supply, and matching device.
8. It belongs to the classic spare parts of semiconductor stock equipment and is mostly used for repairing and replacing old plasma etching and debonding machines.

Main product range

• Control system (DCS/PLC/CNC): panel controller, HMI and human-machine interface, industrial PC, CPU processor module, communication module, analog/digital I/O module
• Drive and motion control: frequency converter, servo drive, servo motor, power module
• Robot spare parts: key spare parts such as robot control board, axis computer, servo unit, I/O module, etc
• State monitoring and safety system: vibration monitoring system, safety instrumented system (SIS), redundant controller

Application Industry

The products are widely used in various industrial fields such as metallurgy, oil and gas, petrochemicals, electricity, power transmission and distribution, water conservancy, water treatment and environmental protection, coal mining, aluminum industry, glass manufacturing, paper and printing, textile printing and dyeing, machinery manufacturing, electronics manufacturing, automobile manufacturing, plastic machinery, boiler heating, energy, etc.

MKS ASTEX FI20162-1 Microwave Plasma Power Supply

Main brand

————————Shenzhen Changxin Automation Equipment Co Ltd -————————

Products that have been released are welcome for consultation. Due to the wide variety of models, we were unable to upload physical images one by one!

Parameter Specifications