For several years, CHANGXIN have specialized in trading high-quality components in the field of industrial automation.
Focusing on PLC components, DCS and CNC technology, and drivetechnology
Schumacher ATCS-15 1464-0320 closed-loop temperature controller
| Brand: Schumacher |
| Item NO: ATCS‑15 1464‑0320 |
| Effect: High precision closed-loop temperature controller for semiconductor equipment |
| Condition: In stock, brand new/Used |
| Warranty: 365 days |
| Payment:T/T 50% deposit, 50% balance |
| www.szcxdcs.com |
+86 15359298293
Schumacher ATCS-15 1464-0320 closed-loop temperature controller
ATCS-15 1464-0320 is a high-precision closed-loop temperature controller specifically designed for Schumacher semiconductor equipment. It is mainly used in conjunction with semiconductor wafer process equipment for precise temperature control of heat exchangers/cold plates
Main function:
- Receive temperature sensor signals, accurately control the fluid heat exchange unit through PID algorithm, and achieve constant temperature control of process chambers and wafer carriers;
- Real time temperature collection, output alarm signals, and achieve interlocking protection for over temperature, low temperature, and abnormal flow;
- Provide a local operation panel and support communication with the upper computer. Receive temperature setting values issued by the device host and upload temperature and fault status;
- Built in complete hardware diagnosis to identify sensor faults and fluid circuit abnormalities;
- Support formula storage and adapt to different semiconductor process temperature curves;

We are a trader specializing in the supply of industrial automation control system spare parts, providing long-term services to the manufacturing and energy infrastructure sectors. Our business covers discontinued spare parts, functional modules, control cards, and drive devices for the four core systems of PLC, DCS, robots, and servo drives. We are committed to providing customers with stable and reliable replacement and supply chain solutions for discontinued parts.
Main product range
- Control system (DCS/PLC/CNC): panel controller, HMI and human-machine interface, industrial PC, CPU processor module, communication module, analog/digital I/O module
- Drive and motion control: frequency converter, servo drive, servo motor, power module
- Robot spare parts: key spare parts such as robot control board, axis computer, servo unit, I/O module, etc
- State monitoring and safety system: vibration monitoring system, safety instrumented system (SIS), redundant controller
Application Industry
The products are widely used in various industrial fields such as metallurgy, oil and gas, petrochemicals, electricity, power transmission and distribution, water conservancy, water treatment and environmental protection, coal mining, aluminum industry, glass manufacturing, paper and printing, textile printing and dyeing, machinery manufacturing, electronics manufacturing, automobile manufacturing, plastic machinery, boiler heating, energy, etc.
Schumacher ATCS-15 1464-0320 closed-loop temperature controller


Main brand
| No. | Brand | Country/Region | Main Product Lines | Typical Series/Models |
| 1 | ABB | Switzerland | PLC/DCS Controllers, I/O Modules, Robot Spare Parts, Drive Systems | AC800PEC,AC800M, AC800F, AC31, 800xA, Bailey INFI 90, DSQC Robot Modules, Advant OCS, H&B Freelance |
| 2 | Bently Nevada | USA | Condition Monitoring Systems, Vibration Sensors, Proximitors | 3500 Monitoring System, 3300 Monitoring System, Eddy Current Probes, Proximitors |
| 3 | TRICONEX | USA | Safety Instrumented Systems (SIS), TMR Redundant Controllers | Tricon System Modules, Communication Modules, I/O Modules |
| 4 | Woodward | USA | Steam/Gas Turbine Control, Speed Governing Systems, Actuators | 505 Governor, ProTech, MicroNet, NetCon Series |
| 5 | FOXBORO | USA | DCS Systems, I/A Series Control Modules | I/A Series, FBM Modules, Controllers |
| 6 | WESTINGHOUSE | USA | DCS Systems, Ovation Controllers, Modules | Ovation System, WDPF Series |
| 7 | Motorola | USA | Industrial Communication Modules, Embedded Control Modules | MVME Series, VME Bus Modules |
| 8 | GE | USA | PLC, Excitation System Modules, CPU/Communication/Analog Modules | IS200/DS200 Excitation Cards, IC693/IC695/IC697/IC698/IC200/IC660/IC670 Series |
| 9 | YOKOGAWA | Japan | DCS Systems, CPU Modules, I/O Cards | CENTUM CS3000, CS1000, VP Series |
| 10 | HIMA | Germany | Safety Control Systems, SIL Safety Modules | H41q/H51q, HIMax, HIMatrix Series |
| 11 | EMERSON | USA | DCS Systems, Redundant Controllers, Safety Systems | Ovation, DeltaV Dual-Channel Redundant Safety Systems |
| 12 | Honeywell | USA | DCS Systems, Process Control Modules | Experion PKS/LS/HS, Plant Scape, TDC2000, TDC3000, TPS, Alcont |
| 13 | ICS TRIPLEX | UK | Trusted Safety Control Systems, TMR Modules | Trusted System, T8000 Series |
| 14 | Kollmorgen | USA | Servo Drives, Servo Motors, Motion Control | S700, S300, AKD Series Drives, Servo Motors |
| 15 | PROSOFT | USA | Industrial Communication Modules, Protocol Gateways | MVI69, MVI56, MVI94, MVI71, MVI46, PS69, 3150 Series |
| 16 | Alstom | France | Power Control, Protection Relays, Control Systems | GEC ALSTHOM, Protection and Control Modules |
| 17 | EATON | USA | Electrical Control, PLC, Power Supplies, Circuit Breakers | XC/XN Series PLC, Moeller Series, Power Supply Modules |
| 18 | Allen-Bradley (Rockwell) | USA | PLC Controllers, I/O Modules, Communication Modules | ControlLogix 1756, CompactLogix 1769, SLC 500 1747/1746, PLC-5 1771/1785 |
| 19 | Schneider | France | PLC, Modicon Series, CPU/Communication Modules | Quantum 140, Modicon M340, Modicon Premium |
————————Shenzhen Changxin Automation Equipment Co Ltd -————————
Products that have been released are welcome for consultation. Due to the wide variety of models, we were unable to upload physical images one by one!
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Parameter Specifications
| Item | Specification |
|---|---|
| Model | ATCS‑15 1464‑0320 |
| Brand | Schumacher(Nordson) |
| Device type | Semiconductor precision thermal temperature controller |
| Power supply | 100‑240 VAC, 50‑60Hz |
| Temperature control range | +10℃ ~ +60℃ |
| Control accuracy | ±0.1 ℃ |
| Sensor type | RTD PT100 |
| Communication interface | RS‑232 / RS‑485 |
| Diagnostic | Over‑temp, low‑temp, flow fault, sensor break detection |
| Human‑machine interface | Local LED display & keypad |
| Net weight | 4.2 kg |
| Mounting | 19‑inch rack mount |
| Protection class | IP20 |
| Operating temperature | 10℃ ~ +45℃ |
| Humidity | 20‑80% RH non‑condensing |
| Certification | CE, SEMI S2 |
| Status | Obsolete, spare‑part only |











